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Tetsu Tanaka
ORCID
Publication Activity (10 Years)
Years Active: 1994-2023
Publications (10 Years): 26
Top Topics
Rf Sputtering
Artificial Vision
Aspect Ratio
Motion Prediction
Top Venues
3DIC
BioCAS
IRPS
Micromachines
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Publications
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Kohei Nakamura
,
Bang Du
,
Keishun Sugishita
,
Ryo Hasegawa
,
Hisashi Kino
,
Takafumi Fukushima
,
Koji Kiyoyama
,
Tetsu Tanaka
Development of Trans-nail PPG Controller Using Fingertip Blood Volume Changes to Enable Highly Accurate Motion Prediction.
BioCAS
(2023)
Jiayi Shen
,
Chang Liu
,
Tadaaki Hoshi
,
Atsushi Sinoda
,
Hisashi Kino
,
Tetsu Tanaka
,
Mariappan Murugesan
,
Mitsumasa Koyanagi
,
Takafumi Fukushima
Impact of Super-long-throw PVD on TSV Metallization and Die-to-Wafer 3D Integration Based on Via-last.
3DIC
(2023)
Kohei Nakamura
,
Yaogan Liang
,
Bang Du
,
Shengwei Wang
,
Yuta Aruga
,
Bunta Inoue
,
Hisashi Kino
,
Takafumi Fukushima
,
Koji Kiyoyama
,
Tetsu Tanaka
Implementation of Light and Dark Adaptation Function for High QOL 3D-Stacked Artificial Retina Chip.
BioCAS
(2022)
Yaogan Liang
,
Bang Du
,
Kohei Nakamura
,
Shengwei Wang
,
Bunta Inoue
,
Yuta Aruga
,
Hisashi Kino
,
Takafumi Fukushima
,
Koji Kiyoyama
,
Tetsu Tanaka
3D-stacked retinal prosthesis chip with binary image capture and edge detection functions for human visual restoration.
IEICE Electron. Express
19 (23) (2022)
Yaogan Liana
,
Zhengyang Qian
,
Bang Du
,
Jinming Ye
,
Kohei Nakamura
,
Shengwei Wang
,
Hisashi Kino
,
Takafumi Fukushima
,
Koji Kiyoyama
,
Tetsu Tanaka
Design and Evaluation of Electronic-Microsaccade with Balanced Stimulation for Artificial Vision System.
BioCAS
(2021)
Takafumi Fukushima
,
Shinichi Sakuyama
,
Masatomo Takahashi
,
Hiroyuki Hashimoto
,
Jichoel Bea
,
Theodorus Marcello
,
Hisashi Kino
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
,
Mariappan Murugesan
Integration of Damage-less Probe Cards Using Nano-TSV Technology for Microbumped Wafer Testing.
3DIC
(2021)
Rui Liang
,
Sungho Lee
,
Yuki Miwa
,
Kousei Kumahara
,
Mariappan Murugesan
,
Hisashi Kino
,
Takafumi Fukushima
,
Tetsu Tanaka
Impacts of Deposition Temperature and Annealing Condition on Ozone-Ethylene Radical Generation-TEOS-CVD SiO2 for Low-Temperature TSV Liner Formation.
3DIC
(2019)
Ryosuke Yabuki
,
Tetsu Tanaka
,
Zhengyang Qian
,
Kar Mun Lee
,
Bang Du
,
Filipe Alves Satake
,
Tasuku Fukushima
,
Hisashi Kino
,
Takafumi Fukushima
,
Koji Kiyoyama
PPG and SpO2 Recording Circuit with Ambient Light Cancellation for Trans-Nail Pulse-Wave Monitoring System.
BioCAS
(2019)
Hisashi Kino
,
Takafumi Fukushima
,
Tetsu Tanaka
Investigation of the Underfill with Negative-Thermal-Expansion Material to Suppress Mechanical Stress in 3D Integration System.
3DIC
(2019)
Koji Kiyoyama
,
Qian Zhengy
,
Hiroyuki Hashimoto
,
Hisashi Kino
,
Takafumi Fukushima
,
Tetsu Tanaka
Development of a CDS Circuit for 3-D Stacked Neural Network Chip using CMOS Analog Signal Processing.
3DIC
(2019)
Yuki Miwa
,
Sungho Lee
,
Rui Liang
,
Kousei Kumahara
,
Hisashi Kino
,
Takafumi Fukushima
,
Tetsu Tanaka
Characterization of Low-Height Solder Microbump Bonding for Fine-Pitch Inter-Chip Connection in 3DICs.
3DIC
(2019)
Sungho Lee
,
Yuki Susumago
,
Zhengyang Qian
,
Noriyuki Takahashi
,
Hisashi Kino
,
Tetsu Tanaka
,
Takafumi Fukushima
Development of 3D-IC Embedded Flexible Hybrid System.
3DIC
(2019)
Kar Mun Lee
,
Zhengyang Qian
,
Ryosuke Yabuki
,
Bang Du
,
Hisashi Kino
,
Takafumi Fukushima
,
Koji Kiyoyama
,
Tetsu Tanaka
Continuous Peripheral Blood Pressure Measurement with ECG and PPG Signals at Fingertips.
BioCAS
(2018)
Yoshiki Takezawa
,
Koji Kiyoyama
,
Kenji Shimokawa
,
Zhengyang Qian
,
Hisashi Kino
,
Takafumi Fukushima
,
Tetsu Tanaka
Ultrawide range square wave impedance analysis circuit with ultra-slow ring-oscillator using gate-induced drain-leakage current.
BioCAS
(2017)
Kenji Shimokawa
,
Zhengyang Qian
,
Yoshiki Takezawa
,
Hisashi Kino
,
Takafumi Fukushima
,
Kouji Kiyoyama
,
Tetsu Tanaka
Experimental evaluation of stimulus current generator with Laplacian edge-enhancement for 3-D stacked retinal prosthesis chip.
BioCAS
(2017)
Mariappan Murugesan
,
Jichel Bea
,
Takafumi Fukushima
,
Makoto Motoyoshi
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Improving the integrity of Ti barrier layer in Cu-TSVs through self-formed TiSix for via-last TSV technology.
3DIC
(2016)
Takafumi Fukushima
,
Hideto Hashiguchi
,
Hiroshi Yonekura
,
Hisashi Kino
,
Mariappan Murugesan
,
Ji Chel Bea
,
Kang Wook Lee
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Oxide-Oxide Thermocompression Direct Bonding Technologies with Capillary Self-Assembly for Multichip-to-Wafer Heterogeneous 3D System Integration.
Micromachines
7 (10) (2016)
Takafumi Fukushima
,
Mariappan Murugesan
,
Shin Ohsaki
,
Hiroyuki Hashimoto
,
Jichoel Bea
,
Kang Wook Lee
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
New concept of TSV formation methodology using Directed Self-Assembly (DSA).
3DIC
(2016)
Koji Kiyoyama
,
Yoshiki Takezawa
,
Tatsuya Goto
,
Keita Ito
,
Shoma Uno
,
Kenji Shimokawa
,
Satoru Nishino
,
Hisashi Kino
,
Tetsu Tanaka
Wide-range and precise tissue impedance analysis circuit with ultralow current source using gate-induced drain-leakage current.
BioCAS
(2016)
Hisashi Kino
,
Takafumi Fukushima
,
Tetsu Tanaka
Drastic reduction of keep-out-zone in 3D-IC by local stress suppression with negative-CTE filler.
3DIC
(2016)
Mariappan Murugesan
,
Jichoel Bea
,
Hiroyuki Hashimoto
,
K. W. Lee
,
Mitsu Koyanagi
,
Takafumi Fukushima
,
Tetsu Tanaka
Mitigating thermo mechanical stress in high-density 3D-LSI through dielectric liners in Cu- through silicon Via _ µ-RS and µ-XRD study.
3DIC
(2015)
Kang Wook Lee
,
Ji Chel Bea
,
Mariappan Murugesan
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Impacts of 3-D integration processes on device reliabilities in thinned DRAM chip for 3-D DRAM.
IRPS
(2015)
Hisashi Kino
,
Hideto Hashiguchi
,
Seiya Tanikawa
,
Yohei Sugawara
,
Shunsuke Ikegaya
,
Takafumi Fukushima
,
Mitsumasa Koyanagi
,
Tetsu Tanaka
Consideration of microbump layout for reduction of local bending stress due to CTE Mismatch in 3D IC.
3DIC
(2015)
Takafumi Fukushima
,
Taku Suzuki
,
Hideto Hashiguchi
,
Chisato Nagai
,
Jichoel Bea
,
Hiroyuki Hashimoto
,
Mariappan Murugesan
,
Kang Wook Lee
,
Tetsu Tanaka
,
Kazushi Asami
,
Yasuhiro Kitamura
,
Mitsumasa Koyanagi
Transfer and non-transfer stacking technologies based on chip-to-wafer self-asembly for high-throughput and high-precision alignment and microbump bonding.
3DIC
(2015)
Seiya Tanikawa
,
Hisashi Kino
,
Takafumi Fukushima
,
Mitsumasa Koyanagi
,
Tetsu Tanaka
Novel local stress evaluation method in 3D IC using DRAM cell array with planar mOS capacitors.
3DIC
(2015)
K. W. Lee
,
Ji Chel Bea
,
Mitsu Koyanagi
,
Takafumi Fukushima
,
Tetsu Tanaka
Advanced 2.5D/3D hetero-integration technologies at GINTI, Tohoku University.
3DIC
(2015)
Mariappan Murugesan
,
Takafumi Fukushima
,
Ji Chel Bea
,
K. W. Lee
,
Mitsu Koyanagi
,
Y. Imai
,
S. Kimura
,
Tetsu Tanaka
Micro-XRD investigation of fine-pitch Cu-TSV induced thermo-mechanical stress in high-density 3D-LSI.
3DIC
(2014)
Fumihiro Inoue
,
Harold Philipsen
,
Marleen H. van der Veen
,
Kevin Vandersmissen
,
Stefaan Van Huylenbroeck
,
Herbert Struyf
,
Tetsu Tanaka
Cu seeding using electroless deposition on Ru liner for high aspect ratio through-Si vias.
3DIC
(2014)
Takafumi Fukushima
,
Yuka Ito
,
Mariappan Murugesan
,
Jicheol Bea
,
Kang Wook Lee
,
Koji Choki
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Tiny VCSEL chip self-assembly for advanced chip-to-wafer 3D and hetero integration.
3DIC
(2014)
Kouji Kiyoyama
,
Y. Sato
,
Hiroyuki Hashimoto
,
Kang Wook Lee
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
A block-parallel ADC with digital noise cancelling for 3-D stacked CMOS image sensor.
3DIC
(2013)
Kang Wook Lee
,
Seiya Tanikawa
,
Mariappan Murugesan
,
H. Naganuma
,
Jichoel Bea
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Impact of 3-D integration process on memory retention characteristics in thinned DRAM chip for 3-D memory.
3DIC
(2013)
Mariappan Murugesan
,
Jichoel Bea
,
Kang Wook Lee
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
,
Yuji Sutou
,
H. Wang
,
J. Koike
Effect of CVD Mn oxide layer as Cu diffusion barrier for TSV.
3DIC
(2013)
Hiroyuki Hashimoto
,
Takafumi Fukushima
,
Kang Wook Lee
,
Mitsumasa Koyanagi
,
Tetsu Tanaka
Highly efficient TSV repair technology for resilient 3-D stacked multicore processor system.
3DIC
(2013)
Shota Kanno
,
Sang-Rim Lee
,
T. Harashima
,
Toshinobu Kuki
,
Hisashi Kino
,
Hajime Mushiake
,
Hongyi Yao
,
Tetsu Tanaka
Multiple optical stimulation to neuron using Si opto-neural probe with multiple optical waveguides and metal-cover for optogenetics.
EMBC
(2013)
H. Naganuma
,
Kouji Kiyoyama
,
Tetsu Tanaka
A 37 × 37 pixels artificial retina chip with edge enhancement function for 3-D stacked fully implantable retinal prosthesis.
BioCAS
(2012)
Takafumi Fukushima
,
Yuki Ohara
,
Jichoel Bea
,
Mariappan Murugesan
,
Kang Wook Lee
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Temporary bonding strength control for self-assembly-based 3D integration.
3DIC
(2011)
Mariappan Murugesan
,
Harufumi Kobayashi
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
High density Cu-TSVs and reliability issues.
3DIC
(2011)
Kouji Kiyoyama
,
Kang Wook Lee
,
Takafumi Fukushima
,
H. Naganuma
,
H. Kobayashi
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
A very low area ADC for 3-D stacked CMOS image processing system.
3DIC
(2011)
Akihiro Noriki
,
Kang Wook Lee
,
Jichoel Bea
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Fabrication tolerance evaluation of high efficient unidirectional optical coupler for though silicon photonic via in optoelectronic 3D-LSI.
3DIC
(2011)
Mariappan Murugesan
,
Hideto Hashiguchi
,
Harufumi Kobayashi
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
W/Cu TSVs for 3D-LSI with minimum thermo-mechanical stress.
3DIC
(2011)
Takafumi Fukushima
,
Takayuki Konno
,
Eiji Iwata
,
Risato Kobayashi
,
Toshiya Kojima
,
Mariappan Murugesan
,
Ji Chel Bea
,
Kang Wook Lee
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Self-Assembly of Chip-Size Components with Cavity Structures: High-Precision Alignment and Direct Bonding without Thermal Compression for Hetero Integration.
Micromachines
2 (1) (2011)
Kang Wook Lee
,
Jichoel Bea
,
Takafumi Fukushima
,
Yuki Ohara
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
High reliable and fine size of 5-μm diameter backside Cu through-silicon Via(TSV) for high reliability and high-end 3-D LSIs.
3DIC
(2011)
Yuki Ohara
,
Kang Wook Lee
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Novel detachable bonding process with wettability control of bonding surface for versatile chip-level 3D integration.
3DIC
(2011)
Akihiro Noriki
,
Kang Wook Lee
,
Jichoel Bea
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Through Silicon photonic via (TSPV) with Si core for low loss and high-speed data transmission in opto-electronic 3-D LSI.
3DIC
(2010)
Mitsumasa Koyanagi
,
Takafumi Fukushima
,
Tetsu Tanaka
Three-dimensional integration technology using through-si via based on reconfigured wafer-to-wafer bonding.
CICC
(2010)
Kouji Kiyoyama
,
Kang Wook Lee
,
Takafumi Fukushima
,
H. Naganuma
,
Hiroaki Kobayashi
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
A block-parallel signal processing system for CMOS image sensor with three-dimensional structure.
3DIC
(2010)
Takafumi Fukushima
,
Eiji Iwata
,
Jichoel Bea
,
Mariappan Murugesan
,
Kang Wook Lee
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Evaluation of alignment accuracy on chip-to-wafer self-assembly and mechanism on the direct chip bonding at room temperature.
3DIC
(2010)
Mariappan Murugesan
,
Yuki Ohara
,
Jichoel Bea
,
Kang Wook Lee
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Impact of microbump induced stress in thinned 3D-LSIs after wafer bonding.
3DIC
(2010)
Mitsumasa Koyanagi
,
Takafumi Fukushima
,
Tetsu Tanaka
Three-dimensional integration technology and integrated systems.
ASP-DAC
(2009)
Takafumi Fukushima
,
Eiji Iwata
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Development of a new self-assembled die bonder to three-dimensionally stack known good dies in batch.
3DIC
(2009)
Kouji Kiyoyama
,
Yuki Ohara
,
Kang Wook Lee
,
Y. Yang
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
A parallel ADC for high-speed CMOS image processing system with 3D structure.
3DIC
(2009)
Kang Wook Lee
,
Shigeyuki Kanno
,
Yuki Ohara
,
Kouji Kiyoyama
,
Ji Chel Bea
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Heterogeneous integration technology for MEMS-LSI multi-chip module.
3DIC
(2009)
Yoshiyuki Kaiho
,
Yuki Ohara
,
Hirotaka Takeshita
,
Kouji Kiyoyama
,
Kang Wook Lee
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
3D integration technology for 3D stacked retinal chip.
3DIC
(2009)
Mitsumasa Koyanagi
,
Takafumi Fukushima
,
Tetsu Tanaka
High-Density Through Silicon Vias for 3-D LSIs.
Proc. IEEE
97 (1) (2009)
Yuki Ohara
,
Akihiro Noriki
,
Katsuyuki Sakuma
,
Kang Wook Lee
,
Mariappan Murugesan
,
Jichoel Bea
,
Fumiaki Yamada
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
10 µm fine pitch Cu/Sn micro-bumps for 3-D super-chip stack.
3DIC
(2009)
Ji Chel Bea
,
Mariappan Murugesan
,
Yuki Ohara
,
Akihiro Noriki
,
Hisashi Kino
,
Kang Wook Lee
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration.
3DIC
(2009)
Katsuyoshi Sato
,
Takeshi Manabe
,
Toshio Ihara
,
Hiroshi Saito
,
Shigeru Ito
,
Tetsu Tanaka
,
Kazuyoshi Sugai
,
Norichika Ohmi
,
Yasushi Murakami
,
Masanori Shibayama
,
Yoshihiko Konishi
,
Tsuneto Kimura
Measurements of reflection and transmission characteristics of interior structures of office building in the 60 GHz band.
PIMRC
(1996)
Tetsu Tanaka
A study on multipath propagation characteristics for RAKE receiving technique.
PIMRC
(1994)