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High reliable and fine size of 5-μm diameter backside Cu through-silicon Via(TSV) for high reliability and high-end 3-D LSIs.

Kang Wook LeeJichoel BeaTakafumi FukushimaYuki OharaTetsu TanakaMitsumasa Koyanagi
Published in: 3DIC (2011)
Keyphrases
  • high reliability
  • high end
  • low cost
  • high precision
  • low end
  • computer systems
  • mobile devices
  • computing systems
  • frame rate
  • real time
  • high quality
  • computational complexity
  • file system