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New concept of TSV formation methodology using Directed Self-Assembly (DSA).

Takafumi FukushimaMariappan MurugesanShin OhsakiHiroyuki HashimotoJichoel BeaKang Wook LeeTetsu TanakaMitsumasa Koyanagi
Published in: 3DIC (2016)
Keyphrases
  • neural network
  • information systems
  • lower bound
  • concept learning
  • real time
  • machine learning
  • artificial intelligence
  • clustering algorithm
  • data structure
  • preprocessing