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W/Cu TSVs for 3D-LSI with minimum thermo-mechanical stress.
Mariappan Murugesan
Hideto Hashiguchi
Harufumi Kobayashi
Takafumi Fukushima
Tetsu Tanaka
Mitsumasa Koyanagi
Published in:
3DIC (2011)
Keyphrases
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mechanical properties
latent semantic indexing
neural network
text retrieval
finite element model
stress distribution
data sets
information retrieval
learning algorithm
feature selection
minimum cost
high density
mechanical design