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Ji Chel Bea
Publication Activity (10 Years)
Years Active: 2009-2019
Publications (10 Years): 3
Top Topics
High Density
Lower Layers
Web Environment
Magnetic Tape
Top Venues
3DIC
IRPS
Micromachines
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Publications
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Mariappan Murugesan
,
Mitsumasa Koyanagi
,
Hiroyuki Hashimoto
,
Ji Chel Bea
,
Takafumi Fukushima
Fabrication and Morphological Characterization of Nano-Scale Interconnects for 3D-Integration.
3DIC
(2019)
Mariappan Murugesan
,
Takafumi Fukushima
,
Ji Chel Bea
,
Hiroyuki Hashimoto
,
Mitsu Koyanagi
Intra- and inter-chip electrical interconnection formed by directed self assembly of nanocomposite containing diblock copolymer and nanometal.
IRPS
(2018)
Takafumi Fukushima
,
Hideto Hashiguchi
,
Hiroshi Yonekura
,
Hisashi Kino
,
Mariappan Murugesan
,
Ji Chel Bea
,
Kang Wook Lee
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Oxide-Oxide Thermocompression Direct Bonding Technologies with Capillary Self-Assembly for Multichip-to-Wafer Heterogeneous 3D System Integration.
Micromachines
7 (10) (2016)
Kang Wook Lee
,
Ji Chel Bea
,
Mariappan Murugesan
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Impacts of 3-D integration processes on device reliabilities in thinned DRAM chip for 3-D DRAM.
IRPS
(2015)
K. W. Lee
,
Chisato Nagai
,
Ai Nakamura
,
Hiroki Aizawa
,
Ji Chel Bea
,
Mitsumasa Koyanagi
,
Hideto Hashiguchi
,
Takafumi Fukushima
,
Tanaka Tanaka
Reconfigured multichip-on-wafer (mCoW) Cu/oxide hybrid bonding technology for ultra-high density 3D integration using recessed oxide, thin glue adhesive, and thin metal capping layers.
3DIC
(2015)
K. W. Lee
,
Ji Chel Bea
,
Mitsu Koyanagi
,
Takafumi Fukushima
,
Tetsu Tanaka
Advanced 2.5D/3D hetero-integration technologies at GINTI, Tohoku University.
3DIC
(2015)
K. W. Lee
,
Chisato Nagai
,
Ai Nakamura
,
Ji Chel Bea
,
Mariappan Murugesan
,
Takafumi Fukushima
,
Tanaka Tanaka
,
Mitsumasa Koyanagi
Effects of electro-less Ni layer as barrier/seed layers for high reliable and low cost Cu TSV.
3DIC
(2014)
Mariappan Murugesan
,
Takafumi Fukushima
,
Ji Chel Bea
,
K. W. Lee
,
Mitsu Koyanagi
,
Y. Imai
,
S. Kimura
,
Tetsu Tanaka
Micro-XRD investigation of fine-pitch Cu-TSV induced thermo-mechanical stress in high-density 3D-LSI.
3DIC
(2014)
Takafumi Fukushima
,
Takayuki Konno
,
Eiji Iwata
,
Risato Kobayashi
,
Toshiya Kojima
,
Mariappan Murugesan
,
Ji Chel Bea
,
Kang Wook Lee
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Self-Assembly of Chip-Size Components with Cavity Structures: High-Precision Alignment and Direct Bonding without Thermal Compression for Hetero Integration.
Micromachines
2 (1) (2011)
Kang Wook Lee
,
Shigeyuki Kanno
,
Yuki Ohara
,
Kouji Kiyoyama
,
Ji Chel Bea
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Heterogeneous integration technology for MEMS-LSI multi-chip module.
3DIC
(2009)
Ji Chel Bea
,
Mariappan Murugesan
,
Yuki Ohara
,
Akihiro Noriki
,
Hisashi Kino
,
Kang Wook Lee
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration.
3DIC
(2009)