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Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration.

Ji Chel BeaMariappan MurugesanYuki OharaAkihiro NorikiHisashi KinoKang Wook LeeTakafumi FukushimaTetsu TanakaMitsumasa Koyanagi
Published in: 3DIC (2009)
Keyphrases
  • high speed
  • high density
  • data sets
  • genetic algorithm
  • data acquisition
  • data mining
  • image processing
  • data analysis
  • image analysis
  • data model
  • infrared
  • correlation analysis