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Novel local stress evaluation method in 3D IC using DRAM cell array with planar mOS capacitors.
Seiya Tanikawa
Hisashi Kino
Takafumi Fukushima
Mitsumasa Koyanagi
Tetsu Tanaka
Published in:
3DIC (2015)
Keyphrases
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evaluation method
integrated circuit
evaluation methods
high density
main memory
evaluation model
fuzzy comprehensive evaluation
credit risk
low voltage
analytic hierarchy process
decision making
data structure
random access memory