Login / Signup
Yuki Miwa
Publication Activity (10 Years)
Years Active: 2019-2019
Publications (10 Years): 2
Top Topics
Film Thickness
Rf Sputtering
Vlsi Design
High Temperature
Top Venues
3DIC
</>
Publications
</>
Rui Liang
,
Sungho Lee
,
Yuki Miwa
,
Kousei Kumahara
,
Mariappan Murugesan
,
Hisashi Kino
,
Takafumi Fukushima
,
Tetsu Tanaka
Impacts of Deposition Temperature and Annealing Condition on Ozone-Ethylene Radical Generation-TEOS-CVD SiO2 for Low-Temperature TSV Liner Formation.
3DIC
(2019)
Yuki Miwa
,
Sungho Lee
,
Rui Liang
,
Kousei Kumahara
,
Hisashi Kino
,
Takafumi Fukushima
,
Tetsu Tanaka
Characterization of Low-Height Solder Microbump Bonding for Fine-Pitch Inter-Chip Connection in 3DICs.
3DIC
(2019)