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J. Koike
Publication Activity (10 Years)
Years Active: 2013-2013
Publications (10 Years): 0
Top Topics
Diffusion Processes
Silicon Dioxide
Electron Microscopy
Top Venues
3DIC
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Publications
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Mariappan Murugesan
,
Jichoel Bea
,
Kang Wook Lee
,
Takafumi Fukushima
,
Tetsu Tanaka
,
Mitsumasa Koyanagi
,
Yuji Sutou
,
H. Wang
,
J. Koike
Effect of CVD Mn oxide layer as Cu diffusion barrier for TSV.
3DIC
(2013)