Marc M. J. van de Wal

Publication Activity (10 Years)

Years Active: 2001-2021
Publications (10 Years): 4

Top Topics

Top Venues

IEEE Trans. Control. Syst. Technol.

IEEE Control. Syst. Lett.

Publications

Daniel W. M. Veldman, Rob H. B. Fey, Hans Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer
Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation. IEEE Trans. Control. Syst. Technol. 29 (2) (2021)
Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Hendrik Nijmeijer
Sensor and Actuator Placement for Proportional Feedback Control in Advection-Diffusion Equations. IEEE Control. Syst. Lett. 4 (1) (2020)
Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer
Optimal actuator shape design with input and state constraints for a wafer heating application. ACC (2019)
M. Dorosti, F. J. M. Heck, Rob H. B. Fey, Marcel François Heertjes, Marc M. J. van de Wal, Henk Nijmeijer
Frequency Response Sensitivity model updating using generic parameters. ACC (2016)
Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch
Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage. IEEE Trans. Control. Syst. Technol. 22 (1) (2014)
Robbert van Herpen, Tom Oomen, Edward Kikken, Marc M. J. van de Wal, Wouter H. T. M. Aangenent, Maarten Steinbuch
Exploiting additional actuators and sensors for nano-positioning robust motion control. ACC (2014)
Frank Boeren, Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
Enhancing performance through multivariable weighting function design in ℋ- loop-shaping: with application to a motion system. ACC (2013)
Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch
Next-generation wafer stage motion control: Connecting system identification and robust control. ACC (2012)
Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage. ACC (2010)
Tom Oomen, Okko H. Bosgra, Marc M. J. van de Wal
Identification for robust inferential control. CDC (2009)
Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
Design framework for high-performance optimal sampled-data control with application to a wafer stage. Int. J. Control 80 (6) (2007)
Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
Aliasing of Resonance Phenomena in Sampled-Data Feedback Control Design: Hazards, Modeling, and a Solution. ACC (2007)
Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
Exploiting H∞ Sampled-Data Control Theory for High-Precision Electromechanical Servo Control Design. ACC (2006)
M. J. Zandvliet, Carsten W. Scherer, Camile W. J. Hol, Marc M. J. van de Wal
control applied to a wafer stage model. CDC (2004)
Marc M. J. van de Wal, Bram de Jager
A review of methods for input/output selection. Autom. 37 (4) (2001)
Marc M. J. van de Wal, Gregor van Baars, Frank Sperling, Okko H. Bosgra
Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage. CDC (2001)