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Design framework for high-performance optimal sampled-data control with application to a wafer stage.

Tom OomenMarc M. J. van de WalOkko H. Bosgra
Published in: Int. J. Control (2007)
Keyphrases
  • sampled data
  • control system
  • probabilistic model
  • machine learning
  • data analysis
  • image quality
  • supervised classification