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Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage.

Marc M. J. van de WalGregor van BaarsFrank SperlingOkko H. Bosgra
Published in: CDC (2001)
Keyphrases
  • high precision
  • experimentally validated
  • high recall
  • closed loop
  • neural network
  • evolutionary algorithm
  • experimental data
  • high reliability
  • achieve high precision