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Next-generation wafer stage motion control: Connecting system identification and robust control.
Tom Oomen
Robbert van Herpen
Sander Quist
Marc M. J. van de Wal
Okko H. Bosgra
Maarten Steinbuch
Published in:
ACC (2012)
Keyphrases
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motion control
control system
mobile robot
robot control
autonomous robots
physical constraints
input output
kinematic model
autonomous navigation
control policies
control strategy
control algorithm
control method
machine learning
closed loop
robotic soccer
computer vision