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Optimal actuator shape design with input and state constraints for a wafer heating application.
Daniel W. M. Veldman
Rob H. B. Fey
Hans J. Zwart
Marc M. J. van de Wal
Joris D. B. J. van den Boom
Henk Nijmeijer
Published in:
ACC (2019)
Keyphrases
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optimal design
design process
state space
case study
massively parallel
shape model
constraint programming
working principle
budget constraints
semiconductor manufacturing
engineering design
shape matching
energy consumption
worst case
object oriented
d objects
user interface
optimal solution