control applied to a wafer stage model.
M. J. ZandvlietCarsten W. SchererCamile W. J. HolMarc M. J. van de WalPublished in: CDC (2004)
Keyphrases
- statistical model
- data mining
- case study
- probabilistic model
- theoretical analysis
- high level
- objective function
- parameter estimation
- experimental data
- control strategies
- prediction model
- simulation model
- neural network model
- sensitivity analysis
- conceptual model
- theoretical framework
- model selection
- probability distribution
- control system
- prior knowledge
- similarity measure
- information systems