Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing.
Jakey BlueAgnès RoussyJacques PinatonPublished in: WSC (2016)
Keyphrases
- fault diagnosis
- industrial systems
- chemical process
- semiconductor manufacturing
- fault detection and diagnosis
- monitoring and fault diagnosis
- neural network
- expert systems
- power plant
- fault detection
- electronic equipment
- condition monitoring
- fuzzy logic
- rbf neural network
- industrial applications
- operating conditions
- bp neural network
- real time
- fault identification
- process control
- failure diagnosis
- gas turbine
- case study
- multiple faults
- computational intelligence
- complex systems