Agnès Roussy

Publication Activity (10 Years)

Years Active: 2016-2021
Publications (10 Years): 6

Top Topics

Manifold Alignment

Fault Diagnosis

Semiconductor Manufacturing

Process Control

Top Venues

IEEE Trans Autom. Sci. Eng.

Expert Syst. Appl.

Publications

Rebecca Clain, Valeria Borodin, Michel Juge, Agnès Roussy
Virtual metrology for semiconductor manufacturing: Focus on transfer learning. CASE (2021)
Ilham Rabhi, Agnès Roussy, François Pasqualini, Cyril Alegret
Out-Of-Control Detection In Semiconductor Manufacturing using One-Class Support Vector Machines. CASE (2021)
Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco S. Reis
A physics-informed Run-to-Run control framework for semiconductor manufacturing. Expert Syst. Appl. 155 (2020)
Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco S. Reis
A Structure Data-Driven Framework for Virtual Metrology Modeling. IEEE Trans Autom. Sci. Eng. 17 (3) (2020)
Wei-Ting Yang, Jakey Blue, Agnès Roussy, Marco S. Reis, Jacques Pinaton
Virtual Metrology Modeling based on Gaussian Bayesian Network. WSC (2018)
Jakey Blue, Agnès Roussy, Jacques Pinaton
Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing. WSC (2016)