Out-Of-Control Detection In Semiconductor Manufacturing using One-Class Support Vector Machines.
Ilham RabhiAgnès RoussyFrançois PasqualiniCyril AlegretPublished in: CASE (2021)
Keyphrases
- semiconductor manufacturing
- process control
- one class support vector machines
- anomaly detection
- control system
- discrete event simulation
- false alarms
- detection algorithm
- false positives
- change detection
- automatic detection
- object detection
- image processing
- control problems
- detection accuracy
- control method
- detection rate
- data acquisition
- control strategy
- optimal control
- event detection
- detection method
- intrusion detection
- pairwise
- control theory
- pattern recognition
- feature extraction
- data sets