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A physics-informed Run-to-Run control framework for semiconductor manufacturing.

Wei-Ting YangJakey BlueAgnès RoussyJacques PinatonMarco S. Reis
Published in: Expert Syst. Appl. (2020)
Keyphrases
  • semiconductor manufacturing
  • main contribution
  • process control
  • control system
  • dynamic programming
  • lightweight
  • databases
  • real world
  • computer vision
  • similarity measure
  • framework enables