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A physics-informed Run-to-Run control framework for semiconductor manufacturing.
Wei-Ting Yang
Jakey Blue
Agnès Roussy
Jacques Pinaton
Marco S. Reis
Published in:
Expert Syst. Appl. (2020)
Keyphrases
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semiconductor manufacturing
main contribution
process control
control system
dynamic programming
lightweight
databases
real world
computer vision
similarity measure
framework enables