Virtual metrology for semiconductor manufacturing: Focus on transfer learning.
Rebecca ClainValeria BorodinMichel JugeAgnès RoussyPublished in: CASE (2021)
Keyphrases
- transfer learning
- semiconductor manufacturing
- process control
- learning tasks
- knowledge transfer
- labeled data
- active learning
- machine learning
- cross domain
- reinforcement learning
- multi task learning
- production system
- text classification
- transfer knowledge
- manifold alignment
- text categorization
- domain adaptation
- control system
- machine learning algorithms
- multi task
- semi supervised learning
- collaborative filtering
- text mining