Diagnosis of Optical Lithography Faults With Product Test Sets.
Munkang ChoiLinda S. MilorPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2008)
Keyphrases
- test set
- fault diagnosis
- model based diagnosis
- multiple faults
- fault detection
- test cases
- electron beam
- fault detection and diagnosis
- error rate
- training set
- fault model
- root cause
- training data
- test data
- expert systems
- fault identification
- life cycle
- neural network
- repair actions
- evaluation methodology
- fault models
- fault detection and isolation
- normal operation
- data mining
- product quality
- integrated circuit
- x ray
- medical diagnosis
- fuzzy logic
- support vector machine
- bayesian networks
- three dimensional