Charging of radiation induced defects in RF MEMS dielectric films.
M. A. ExarchosE. PapandreouPatrick PonsMohamed LamhamdiGeorge J. PapaioannouRobert PlanaPublished in: Microelectron. Reliab. (2006)
Keyphrases
- rf sputtering
- chemical vapor deposition
- electrical properties
- magnetic field
- silicon dioxide
- x ray
- infrared
- radio frequency
- gate dielectrics
- thin film
- defect detection
- relevance feedback
- gate insulator
- defect classification
- high density
- electric vehicles
- silicon nitride
- automated visual inspection
- liquid crystal displays
- information retrieval
- power consumption
- image processing