Guenther Benstetter

Publication Activity (10 Years)

Years Active: 2002-2017
Publications (10 Years): 1

Top Topics

Mechanical Properties

Electron Microscopy

Top Venues

Microelectron. Reliab.

Publications

Tobias Berthold, Guenther Benstetter, Werner Frammelsberger, Manuel Bogner, Rosana Rodríguez, Montserrat Nafría
Protective nanometer films for reliable Cu-Cu connections. Microelectron. Reliab. (2017)
Roland Biberger, Guenther Benstetter, Holger Goebel, Alexander Hofer
Intermittent-contact capacitance spectroscopy - A new method for determining C(V) curves with sub-micron lateral resolution. Microelectron. Reliab. 50 (9-11) (2010)
Roland Biberger, Guenther Benstetter, Holger Goebel
Displacement current sensor for contact and intermittent contact scanning capacitance microscopy. Microelectron. Reliab. 49 (9-11) (2009)
Roland Biberger, Guenther Benstetter, Thomas Schweinböck, Peter Breitschopf, Holger Goebel
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectron. Reliab. 48 (8-9) (2008)
Mario Lanza, Marc Porti, Montserrat Nafría, Guenther Benstetter, Werner Frammelsberger, Heiko Ranzinger, E. Lodermeier, G. Jaschke
Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFM. Microelectron. Reliab. 47 (9-11) (2007)
W. Bergbauer, T. Lutz, Werner Frammelsberger, Guenther Benstetter
Kelvin probe force microscopy - An appropriate tool for the electrical characterisation of LED heterostructures. Microelectron. Reliab. 46 (9-11) (2006)
Peter Breitschopf, Guenther Benstetter, Bernhard Knoll, Werner Frammelsberger
Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling. Microelectron. Reliab. 45 (9-11) (2005)
Werner Frammelsberger, Guenther Benstetter, Thomas Schweinböck, Richard J. Stamp, Janice Kiely
/Si interfaces with combined conducting and topographic atomic force microscopy. Microelectron. Reliab. 43 (9-11) (2003)
Michael W. Ruprecht, Guenther Benstetter, Douglas B. Hunt
A review of ULSI failure analysis techniques for DRAMs. Part II: Defect isolation and visualization. Microelectron. Reliab. 43 (1) (2003)
Guenther Benstetter, Michael W. Ruprecht, Douglas B. Hunt
A review of ULSI failure analysis techniques for DRAMs 1. Defect localization and verification. Microelectron. Reliab. 42 (3) (2002)