Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling.
Peter BreitschopfGuenther BenstetterBernhard KnollWerner FrammelsbergerPublished in: Microelectron. Reliab. (2005)
Keyphrases
- optimization algorithm
- significant improvement
- high accuracy
- detection method
- preprocessing
- experimental evaluation
- support vector machine
- decision trees
- detection algorithm
- theoretical analysis
- classification accuracy
- computational cost
- input data
- cost function
- prior knowledge
- image analysis
- real time
- synthetic data
- segmentation method
- low power