Peter Breitschopf

Publication Activity (10 Years)

Years Active: 2004-2008
Publications (10 Years): 0

Publications

Roland Biberger, Guenther Benstetter, Thomas Schweinböck, Peter Breitschopf, Holger Goebel
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectron. Reliab. 48 (8-9) (2008)
Peter Breitschopf, Guenther Benstetter, Bernhard Knoll, Werner Frammelsberger
Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling. Microelectron. Reliab. 45 (9-11) (2005)
Thomas Schweinböck, S. Schömann, D. Álvarez, Marco Buzzo, Werner Frammelsberger, Peter Breitschopf, Günther Benstetter
New trends in the application of Scanning Probe Techniques in Failure Analysis. Microelectron. Reliab. 44 (9-11) (2004)
Günther Benstetter, Peter Breitschopf, Werner Frammelsberger, Heiko Ranzinger, Peter Reislhuber, Thomas Schweinböck
AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis. Microelectron. Reliab. 44 (9-11) (2004)