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AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis.

Günther BenstetterPeter BreitschopfWerner FrammelsbergerHeiko RanzingerPeter ReislhuberThomas Schweinböck
Published in: Microelectron. Reliab. (2004)
Keyphrases
  • quantitative analysis
  • real time
  • image processing
  • image analysis
  • neural network
  • case study
  • data analysis
  • evolutionary algorithm
  • hidden markov models
  • structured light