Thomas Schweinböck

Publication Activity (10 Years)

Years Active: 2003-2017
Publications (10 Years): 2

Top Topics

High Throughput

Camera Parameters

Autocalibration

Top Venues

Microelectron. Reliab.

Publications

Sören Hommel, Nicole Killat, A. Altes, Thomas Schweinböck, Franz Kreupl
Determination of doping type by calibrated capacitance scanning microwave microscopy. Microelectron. Reliab. (2017)
Sören Hommel, Nicole Killat, A. Altes, Thomas Schweinböck, Doris Schmitt-Landsiedel, M. Silvestri, Oliver Haeberlen
Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre Scale. Microelectron. Reliab. 64 (2016)
Thomas Schweinböck, Sören Hommel
Quantitative Scanning Microwave Microscopy: A calibration flow. Microelectron. Reliab. 54 (9-10) (2014)
Roland Biberger, Guenther Benstetter, Thomas Schweinböck, Peter Breitschopf, Holger Goebel
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectron. Reliab. 48 (8-9) (2008)
Thomas Schweinböck, S. Schömann, D. Álvarez, Marco Buzzo, Werner Frammelsberger, Peter Breitschopf, Günther Benstetter
New trends in the application of Scanning Probe Techniques in Failure Analysis. Microelectron. Reliab. 44 (9-11) (2004)
Günther Benstetter, Peter Breitschopf, Werner Frammelsberger, Heiko Ranzinger, Peter Reislhuber, Thomas Schweinböck
AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis. Microelectron. Reliab. 44 (9-11) (2004)
Marco Buzzo, Markus Leicht, Thomas Schweinböck, Mauro Ciappa, Maria Stangoni, Wolfgang Fichtner
N Junction by Scanning Capacitance and Scanning Electron Microscopy. Microelectron. Reliab. 44 (9-11) (2004)
Werner Frammelsberger, Guenther Benstetter, Thomas Schweinböck, Richard J. Stamp, Janice Kiely
/Si interfaces with combined conducting and topographic atomic force microscopy. Microelectron. Reliab. 43 (9-11) (2003)