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N Junction by Scanning Capacitance and Scanning Electron Microscopy.

Marco BuzzoMarkus LeichtThomas SchweinböckMauro CiappaMaria StangoniWolfgang Fichtner
Published in: Microelectron. Reliab. (2004)
Keyphrases
  • electron microscopy
  • low energy
  • x ray
  • image processing
  • structured light
  • scan data
  • image stacks
  • neural network
  • high speed