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Protective nanometer films for reliable Cu-Cu connections.
Tobias Berthold
Guenther Benstetter
Werner Frammelsberger
Manuel Bogner
Rosana Rodríguez
Montserrat Nafría
Published in:
Microelectron. Reliab. (2017)
Keyphrases
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electron microscopy
x ray
mechanical properties
thin film
data sets
database
machine learning
multi agent systems