Intermittent-contact capacitance spectroscopy - A new method for determining C(V) curves with sub-micron lateral resolution.
Roland BibergerGuenther BenstetterHolger GoebelAlexander HoferPublished in: Microelectron. Reliab. (2010)
Keyphrases
- high precision
- detection method
- preprocessing
- cost function
- pairwise
- significant improvement
- dynamic programming
- experimental evaluation
- diffusion process
- clustering method
- high accuracy
- computational complexity
- objective function
- image processing
- high resolution
- feature set
- segmentation algorithm
- infrared
- classification method
- data sets