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Displacement current sensor for contact and intermittent contact scanning capacitance microscopy.

Roland BibergerGuenther BenstetterHolger Goebel
Published in: Microelectron. Reliab. (2009)
Keyphrases
  • contact force
  • high speed
  • high frequency
  • sensor networks
  • multi sensor
  • database
  • databases
  • single image
  • finite element model
  • master slave