thin films during high temperature X-ray diffraction.
Chao ZhaoGert RoebbenHugo BenderEdward YoungS. HaukkaMichel HoussaMohamed NailiStefan De GendtMarc M. HeynsOmer Van der BiestPublished in: Microelectron. Reliab. (2001)
Keyphrases
- x ray
- thin film
- high temperature
- digital x ray images
- x ray images
- electron microscopy
- transmission electron microscopy
- medical imaging
- three dimensional
- grain size
- ct scans
- high density
- intraoperative
- projection images
- multi layer
- plasma etching
- silicon dioxide
- room temperature
- tomographic images
- film thickness
- chemical vapor deposition
- electron microscope
- electron beam
- range images
- medical images
- image registration