Fault diagnosis expert system of semiconductor manufacturing equipment using a Bayesian network.
Bo LiTing HanFuyong KangPublished in: Int. J. Comput. Integr. Manuf. (2013)
Keyphrases
- fault diagnosis
- semiconductor manufacturing
- expert systems
- bayesian networks
- production system
- discrete event simulation
- process control
- fault detection
- fuzzy logic
- bp neural network
- electronic equipment
- gas turbine
- condition monitoring
- fault detection and diagnosis
- operating conditions
- power transformers
- artificial intelligence
- rbf neural network
- intelligent systems
- rotating machinery
- fault detection and isolation
- analog circuits
- industrial systems
- chemical process
- fault tree
- neural network
- multiple faults
- knowledge base
- failure diagnosis
- fault identification
- monitoring and fault diagnosis
- conditional probabilities
- power plant
- multi sensor information fusion
- soft computing methods
- knowledge based expert systems
- electrical power systems