Fault diagnosis in semiconductor manufacturing processes using a CNN-based generative adversarial network1.
Palanichamy NaveenS. NithyasaiVenkateshkumar UdayamoorthyS. R. Ashok KumarPublished in: J. Intell. Fuzzy Syst. (2024)
Keyphrases
- fault diagnosis
- manufacturing processes
- expert systems
- neural network
- fault detection
- bp neural network
- electronic equipment
- fuzzy logic
- chemical process
- manufacturing systems
- fault detection and diagnosis
- rotating machinery
- gas turbine
- analog circuits
- rbf neural network
- monitoring and fault diagnosis
- multiple faults
- power transformers
- electrical power systems
- industrial systems
- fault identification
- multi sensor information fusion
- product quality
- operating conditions
- condition monitoring
- machine vision
- fault diagnostic
- genetic algorithm