Shape and thermal effects of metal films on stress-induced bending of surface micromachined curved grating.
Chen-Chieh LiaoJu-Nan KuoPublished in: NEMS (2009)
Keyphrases
- curved objects
- shape representation
- high temperature
- grain size
- silicon dioxide
- shape reconstruction
- shape estimation
- statistical shape model
- surface shape
- shape recovery
- recovering shape
- space charge
- d objects
- surface texture
- shape features
- shape model
- surface representation
- shape descriptors
- shape analysis
- film thickness
- line drawings
- deformable surface
- surface points
- electrical properties
- shape matching
- infrared
- surface properties
- metal oxide
- chemical vapor deposition
- stainless steel
- range images
- global shape
- surface registration
- surface model
- material properties
- vector field
- normal vectors
- perspective projection
- surface reconstruction
- object surface
- shape from shading
- photometric stereo
- finite element
- d mesh
- surface patches
- principal curvatures
- implicit surfaces