Impact of Al2O3 position on performances and reliability in high-k metal gated DRAM periphery transistors.
Marc AoulaicheEddy SimoenRomain RitzenthalerTom SchramHiroaki ArimuraMoonju ChoThomas KaueraufGuido GroesenekenNaoto HoriguchiAaron TheanAntonio FedericoFelice CrupiAlessio SpessotChristian CaillatPierre FazanH.-J. NaY. SonK. B. NohPublished in: ESSDERC (2013)