Synthesis and characterisation of curcumin-M (M = B, Fe and Cu) films grown on p-Si substrate for dielectric applications.
A. A. DakhelSeamas CassidyKhalil E. JasimFryad Zeki HenariPublished in: Microelectron. Reliab. (2015)
Keyphrases
- chemical vapor deposition
- thin film
- electron microscopy
- film thickness
- high density
- gate dielectrics
- electrical properties
- rf sputtering
- magnetic recording
- finite element
- dielectric constant
- program synthesis
- grain size
- soft tissue
- magnetic field
- solar cell
- texture synthesis
- leakage current
- medical images
- si sio
- metal oxide
- silicon dioxide
- mathematical analysis
- real time
- silicon nitride