Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing.
Shu-Kai S. FanChia-Yu HsuDu-Ming TsaiFei HeChun-Chung ChengPublished in: IEEE Trans Autom. Sci. Eng. (2020)
Keyphrases
- gas turbine
- semiconductor manufacturing
- fault detection
- fault isolation
- fault diagnosis
- discrete event simulation
- expert systems
- process control
- industrial processes
- data driven
- fault identification
- rotating machinery
- tennessee eastman
- production system
- condition monitoring
- fault localization
- fuel cell
- failure detection
- diagnostic tests
- robust fault detection
- fault detection and diagnosis
- power plant
- fault detection and isolation
- decision making
- model based diagnosis
- evolutionary computation
- case based reasoning
- genetic algorithm
- data mining