Chun-Chung Cheng

Publication Activity (10 Years)

Years Active: 2020-2020
Publications (10 Years): 1

Top Topics

Semiconductor Manufacturing

Fault Detection

Discrete Event Simulation

Fault Detection And Isolation

Top Venues

IEEE Trans Autom. Sci. Eng.

Publications

Shu-Kai S. Fan, Chia-Yu Hsu, Du-Ming Tsai, Fei He, Chun-Chung Cheng
Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing. IEEE Trans Autom. Sci. Eng. 17 (4) (2020)