Autoassociative Neural Networks for Fault Diagnosis in Semiconductor Manufacturing.
Luis J. BarriosLissette Lemus del CuetoPublished in: IEA/AIE (Vol. 2) (1998)
Keyphrases
- fault diagnosis
- auto associative
- neural network
- semiconductor manufacturing
- process control
- fault detection
- rotating machinery
- power transformers
- bp neural network
- artificial neural networks
- fault detection and diagnosis
- back propagation
- operating conditions
- fuzzy logic
- chemical process
- production system
- multi sensor information fusion
- electronic equipment
- condition monitoring
- analog circuits
- industrial systems
- gas turbine
- monitoring and fault diagnosis
- power plant
- electrical power systems
- rbf neural network
- expert systems
- multilayer perceptron
- failure diagnosis
- neural network model
- multiple faults
- fault identification
- radial basis function
- control system
- probabilistic neural networks
- state space
- data fusion
- real time
- information fusion