Machine learning-based techniques for fault diagnosis in the semiconductor manufacturing process: a comparative study.
Abubakar Abdussalam NuhuQasim ZeeshanBabak SafaeiMuhammad Atif ShahzadPublished in: J. Supercomput. (2023)
Keyphrases
- fault diagnosis
- manufacturing process
- machine learning
- process control
- quality control
- expert systems
- neural network
- manufacturing systems
- fuzzy logic
- fault detection
- product design
- fault detection and diagnosis
- bp neural network
- chemical process
- control system
- operating conditions
- power transformers
- gas turbine
- monitoring and fault diagnosis
- rotating machinery
- electronic equipment
- artificial intelligence
- computer vision
- condition monitoring
- multiple faults
- discrete event
- computational intelligence
- multi sensor information fusion
- product quality
- analog circuits
- knowledge acquisition
- design process
- information fusion
- machine vision
- petri net