Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing.
Hamideh RostamiJakey BlueClaude YugmaPublished in: ICMLA (2016)
Keyphrases
- semiconductor manufacturing
- fault diagnosis
- fault detection
- multiple faults
- discrete event simulation
- process control
- sufficient conditions
- fault model
- fault detection and diagnosis
- production system
- fault detection and isolation
- failure modes
- medical diagnosis
- gas turbine
- fault isolation
- fault management
- fault models
- neural network
- automatic extraction
- information extraction
- expert systems
- fingerprint identification
- fingerprint verification
- fingerprint matching
- causal reasoning
- model based diagnosis
- medical diagnostic
- diagnostic tests
- fuzzy logic
- automatic diagnosis
- repair actions
- multi sensor information fusion
- fingerprint classification
- automatically extracted
- feature vectors
- image processing