The influence of hydrogen and nitrogen on the formation of Si nanoclusters embedded in sub-stoichiometric silicon oxide layers.
Liliana CaristiaGiuseppe NicotraCorrado BongiornoNicola CostaSebastiano RavesiSalvo CoffaRiccardo De BastianiMaria Grazia GrimaldiCorrado SpinellaPublished in: Microelectron. Reliab. (2007)
Keyphrases
- si sio
- chemical vapor deposition
- thin film
- room temperature
- metal oxide
- leakage current
- silicon dioxide
- multi layer
- solar cell
- x ray
- electron microscopy
- silicon nitride
- high density
- embedded systems
- transmission electron microscopy
- neural network
- solid state
- steady state
- high speed
- three dimensional
- case study
- data sets
- plasma etching
- gate dielectrics
- real time
- database