Facing the defect characterization and localization challenges of bridge defects on a submicronic technology (45 nm and below).
Guillaume CeliSylvain DuditPhilippe PerduAntoine ReverdyThierry ParrassinEmmanuel BechetDean LewisMichel ValletPublished in: Microelectron. Reliab. (2010)
Keyphrases
- defect detection
- automated visual inspection
- rapid development
- data processing
- lessons learned
- surface defects
- case study
- future trends
- neural network
- widespread adoption
- technical aspects
- technological advances
- cost effective
- key technologies
- key issues
- machine vision
- technical solutions
- computer systems
- data sets
- technical challenges
- emerging technologies
- personal computer
- radio frequency identification rfid
- key findings
- enabling technologies
- innovative solutions
- defect classification
- silicon on insulator