Measurement Technique for Elastic and Mechanical Properties of Polycrystalline Silicon-Germanium Films Using Surface Acoustic Waves and Projection Masks
Abdelali BennisChristina LeinenbachCarsten RaudzisRoland Müller-FiedlerSilvia KronmüllerPublished in: CoRR (2007)
Keyphrases
- mechanical properties
- si sio
- gate dielectrics
- chemical vapor deposition
- metal oxide
- thin film
- silicon dioxide
- composite materials
- liquid crystal
- space charge
- stainless steel
- finite element model
- electrical properties
- high density
- x ray
- high speed
- material properties
- edge detection
- three dimensional
- transmission electron microscopy
- film thickness
- field effect transistors
- wave propagation
- sufficient conditions
- medical images
- plasma etching
- image data
- genetic algorithm
- silicon nitride