Reinforcement of a PDMS master using an oxide-coated silicon plate.
Cheng LuoFang MengXinchuan LiuYiyun GuoPublished in: Microelectron. J. (2006)
Keyphrases
- silicon dioxide
- si sio
- transmission electron microscopy
- reinforcement learning
- field effect transistors
- silicon nitride
- x ray
- gate insulator
- peer data management systems
- high speed
- metal oxide
- leakage current
- electrical properties
- fuel cell
- high temperature
- thin film
- space charge
- heat transfer
- license plate
- high density
- low cost
- query processing
- vehicle license plate
- steady state
- gate dielectrics
- high resolution