Surface ESD (ESDFOS) in assembly fab machineries as a functional and reliability risk - Failure analysis, tool diagnosis and on-site-remedies.
Peter JacobPublished in: Microelectron. Reliab. (2008)
Keyphrases
- analysis tool
- failure rate
- root cause
- scanning electron microscope
- risk management
- highly reliable
- website
- d objects
- component failures
- three dimensional
- model based diagnosis
- medical diagnosis
- fault diagnosis
- risk measures
- failure modes
- risk analysis
- process planning
- surface reconstruction
- multiple faults
- object surface
- multi site
- risk factors
- surface model
- smooth surfaces
- fault detection
- risk assessment
- model based reasoning
- reliability analysis
- free form
- failure detection
- range data