The effect of surface modification and catalytic metal contact on methane sensing performance of nano-ZnO-Si heterojunction sensor.
P. BhattacharyyaGuru P. MishraSamir Kumar SarkarPublished in: Microelectron. Reliab. (2011)
Keyphrases
- sensor networks
- si sio
- metal oxide
- sensor fusion
- thin film
- leakage current
- data acquisition
- real time
- chemical vapor deposition
- grain size
- x ray
- sensing devices
- image sensor
- sensor data
- d objects
- nano scale
- three dimensional
- electron microscopy
- contact force
- micro controller
- low voltage
- laser scanner
- multi sensor
- range data
- stainless steel
- wireless sensor networks
- smooth surfaces
- wearable sensors
- surface model
- surface reconstruction
- activity recognition
- mobile robot
- neural network