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FaJun Yang
ORCID
Publication Activity (10 Years)
Years Active: 2014-2020
Publications (10 Years): 12
Top Topics
Petri Net
Ims Ld
Analysis Tool
Cyclic Scheduling
Top Venues
IEEE Trans. Syst. Man Cybern. Syst.
CASE
ICRA
ICNSC
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Publications
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FaJun Yang
,
Yan Qiao
,
Kaizhou Gao
,
Naiqi Wu
,
Yuting Zhu
,
Ian Ware Simon
,
Rong Su
Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers.
IEEE Trans. Syst. Man Cybern. Syst.
50 (10) (2020)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
,
Rong Su
,
Ting Qu
Modeling and Optimal Cyclic Scheduling of Time-Constrained Single-Robot-Arm Cluster Tools via Petri Nets and Linear Programming.
IEEE Trans. Syst. Man Cybern. Syst.
50 (3) (2020)
Yan Qiao
,
Naiqi Wu
,
FaJun Yang
,
MengChu Zhou
,
Qinghua Zhu
,
Ting Qu
Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance.
IEEE Trans. Syst. Man Cybern. Syst.
49 (6) (2019)
FaJun Yang
,
Naiqi Wu
,
Rong Su
,
Yan Qiao
Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations.
CASE
(2018)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
Optimal One-Wafer Cyclic Scheduling of Hybrid Multirobot Cluster Tools With Tree Topology.
IEEE Trans. Syst. Man Cybern. Syst.
48 (2) (2018)
Yan Qiao
,
Naiqi Wu
,
FaJun Yang
,
MengChu Zhou
,
Qinghua Zhu
Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation.
IEEE Trans. Syst. Man Cybern. Syst.
48 (4) (2018)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
,
ZhiWu Li
Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints.
IEEE Trans. Syst. Man Cybern. Syst.
47 (3) (2017)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid Multicluster Tools via Petri Nets.
IEEE Trans. Syst. Man Cybern. Syst.
47 (11) (2017)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
Optimal scheduling analysis of treelike hybrid multi-cluster tools.
CASE
(2016)
FaJun Yang
,
Naiqi Wu
,
Liping Bai
,
MengChu Zhou
Optimal one-wafer cyclic scheduling analysis of transport-dominant single-arm multi-cluster tools.
CASE
(2016)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry.
ICNSC
(2016)
Zicheng Liu
,
Naiqi Wu
,
FaJun Yang
,
Yan Qiao
Optimal scheduling of time-constrained single-arm cluster tools with wafer revisiting.
WODES
(2016)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module.
ICRA
(2014)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules.
CASE
(2014)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
Optimal One-Wafer Cyclic Scheduling of Single-Arm Multicluster Tools With Two-Space Buffering Modules.
IEEE Trans. Syst. Man Cybern. Syst.
44 (12) (2014)
FaJun Yang
,
Naiqi Wu
,
Yan Qiao
,
MengChu Zhou
Petri Net-Based Polynomially Complex Approach to Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Semiconductor Manufacturing.
IEEE Trans. Syst. Man Cybern. Syst.
44 (12) (2014)