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Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance.
Yan Qiao
Naiqi Wu
FaJun Yang
MengChu Zhou
Qinghua Zhu
Ting Qu
Published in:
IEEE Trans. Syst. Man Cybern. Syst. (2019)
Keyphrases
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clustering algorithm
data clustering
real time
hierarchical clustering
semiconductor manufacturing
end users
scheduling problem
computationally efficient
building blocks
subspace clustering
resource constraints
timing constraints